15 · Université de Neuch?tel31.98 · S?SS MicroOptics SA+ 6Show
more authorsDo you want to read the rest of this article?
CitationsCitations0ReferencesReferences0 Full-text · Conference Paper · Aug 2013
Full-text · Conference Paper · Feb 2001 +1 more author... Full-text · Article · May 2012 +1 more author...Data provided are for informational purposes only. Although carefully collected, accuracy cannot be guaranteed. Publisher conditions are provided by RoMEO. Differing provisions from the publisher's actual policy or licence agreement may be applicable.This publication is from a journal that may support self archiving.
oror log in withResearch and Analysis of NEMS Resonators--《Journal of Electron Devices》2005年01期
Research and Analysis of NEMS Resonators
SONG Da~1, LIU Wen-ping~2, LI Tie~2, LI Xin-xin~2, WANG Yue-lin~(1,2)
1. Department of Information and Electronic Engineering, Zhejiang University, Hangzhou 310027, C 2. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology,
Chinese Academy of Sciences, Shanghai 200050, China)
Main properties and parameters of Nano-Electro-Mechanical-System (NEMS) resonators are introduced. The materials, fabrication technology, excitation and testing methods of NEMS resonators are discussed. Some typical types of NEMS resonators are also classified by structure and operation mode. Finally, the challenges in the development of NEMS resonators are analyzed and the great potential of NEMS resonators in future applications is presented.
【Key Words】：
【CateGory Index】：
supports all the CNKI
only supports the PDF format.
【References】
Chinese Journal Full-text Database
XU Lin-yan~1,LI Da-chao~ 1,2* ,HU Xiao-tang~1,ZHANG Hai-xia~2,HUANG Yu-bo~1 1.State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, C 2.National Key Laboratory of Micro / Nano Fabrication Technology, Peking University, Beijing 100871, C[J];Chinese Journal of Sensors and A2006-05
MAN Haiou,XIAO Dingbang,WU Xuezhong,CHEN Zhihua,HOU Zhanqiang College of Mechatronics Engineering and Automation,National Univ.of Defense Technology,Changsha 410073,C[J];Chinese Journal of Sensors and A2009-08
HE Yang, JIANG Cheng-yu, YUAN Wei-zheng(Micro and Nano Electromechanical Systems Laboratory,Northwestern Polytechnical University,Xi'an, 710072, China);[J];Nanoscience & N2006-05
XU Lin-yan,LI Da-chao,HU Xiao-tang,HUANG Yu-bo(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China);[J];Journal of Tianjin U2007-07
【Citations】
Chinese Journal Full-text Database
Zhou Zhaoying,Yang Xing
(MEMS Lab.,Department of Precision Instruments & Mechnology,Tsinghua University,Beijing 100084,China);[J];Instrument Technique and S2003-02
【Co-citations】
Chinese Journal Full-text Database
WU Ying1,JIANG Yong-qing2,LI Bin3,XIANG Yi1,XU Di1,NIE Hong-bin1(1.School of Electronic Information Engineering,Chongqing University of Science and Technology,Chongqing 401331,CHN;2.Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN;3.Chongqing Common Center,Petrol China Company Limited,Chongqing 400021,CHN);[J];Semiconductor O2009-03
PENG Ying-cai1,2,ZHAO Xin-wei3,4 (1.College of Electronic and Informational Engineering,Hebei University,Baoding .Key Laboratory of Semiconductor Material Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,C 3.Department of Physics,Tokyo University of Science,Tokyo 126-8601,J4.Laboratory of Nano Materials and Nanodeviccs,Institute of Microelectrornics,Chinese Academy of Sciences,Beijing 100029,China);[J];Micronanoelectronic T2005-05
PENG Ying-cai1a,2,ZHAO Xin-wei3,4,FU Guang-sheng1b (1.a.College of Electronic and Informational Eb.College of Physics Science and Technology,Hebei University, Baoding .Key Laboratory of Semiconductor Materials and Science,Institute of Semiconductors, Chinese Academy of Sciences,Beijing .Department of Physics,Tokyo University of Sciences, Tokyo 126-8601,J4.Laboratory of Nano-Materials and Nano-Devices,Institute of Microelectronics, Chinese Academy of Sciences,Beijing 100029,China);[J];Micronanoelectronic T2006-01
PENG Ying-cai1,2,SEIICHI-Miyazaki3,CHEN Kun-ji2,XU Jun2(1.College of Electronic and Informational Engineering,Hebei University,Baoding .Laboratory of Solid-State Micorostructural Physics,Nanjing University,Nanjing .Department of Semiconductor Electronics and Integration Science Graduate School of Advanced Science of Matter,Hiroshima University,Hiroshima);[J];Micronanoelectronic T2007-01
Jin Qinhua 1,2, Wang Yuelin 1,2, Li Tie 2, (1. Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, C2. Shanghai Institute of Microsystem and Information Technology, CAS, Shanghai 200050, China);[J];Micronanoelectronic T2008-04
Luo Rong,Yang Yongjun,Wang Weijun,Liu Yugui,Luo Siwei (The 13th Research Institute,CETC,Shijiazhuang 050051,China);[J];Micronanoelectronic T2009-05
WEN Dian-zhong Major Laboratories of Integrated Circuits, Heilongjiang University, Harbin 150080,C HLJ Province Key Laboratories of senior-education for Electronic Engineering, Heilongjiang University, Harbin 150080,C[J];Chinese Journal of Sensors and A2006-05
GUO Lin-rui,CHEN Feng,YE Xiong-ying,LIU Li-tao,WU Kang,ZHOU Zhao-ying State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments & Mechanology, Tsinghua University, Beijing 100084, C[J];Chinese Journal of Sensors and A2006-05
CHEN Shang,XUE Chen-yang,ZHANG Wen-dong,ZHANG Bin-zhen,WANG Jian,FAN Bo(National Key Laboratory For Electronic Measurement Technology,North University of China,Taiyuan 030051,China);[J];Chinese Journal of Sensors and A2008-03
WANG Ling-ying,DING Zhan-lai(Department of Material Science and Engineering,Shijiazhuang Railway Institute,Shijiazhuang 050043,China);[J];Transducer and Microsystem T2007-12
China Proceedings of conference Full-text Database
Tan Miao Miao Ye Xiong Ying Wang Xiao Hao Zhou Zhao Ying State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments and Mechanology,Micro-Nano Technology Research Center Tsinghua University,Beijing 100084,C[A];[C];2005
ZHANG Xin ZHANG Yu-lin LIU Guo-song(1.School of Control Science and Engineering,Shandong University,Jinan .School of Management,Tianjin University,Tianjin 300072,China);[A];[C];2005
【Co-references】
Chinese Journal Full-text Database
LI Da-chao1,2,FENG Ya-lin2,FU Xing1,HU Xiao-Dong1, JIN Shi-jiu1,HAO Yi-long2,HU Xiao-tang1 (1.State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,C 2.Institute of Microelectronics,Peking University,Beijing 100871,China);[J];Micronanoelectronic T2005-04
ZHANG Peng-fei,LONG Xing-wu (College of Optoelectronics Sci. & Eng., National University of Defense Technology,Changsha 410073, China);[J];Chinese Journal of Sensors and A2006-03
CHEN Huai, ZHANG Rong, ZHOU Bin, CHEN Zhi-yong (Dept of Precision Instr & Mechanology,Tsinghua University,Beijing 100084,China);[J];Journal of Transducer T2004-10
WANG Xiaodong1,2,YANG Yang2,SHE Dongsheng2,WANG Tao2,WANG Liding1,2 (1.Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education,Dalian .Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian 116024,China);[J];Journal of Test and Measurement T2008-05
TAN Yi-yun,YU Hong,HUANG Qing-an,LIU Tong-qing(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);[J];Chinese Journal of Electron D2007-03
Zhu Ying Yao Yingxue Zhou L[J];Tool E2004-08
ZHOU Liang, YAO Yingxue, SHAHJADA A P(School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001, China);[J];Journal of The Chinese Ceramic S2005-07
Gao Dong, Yao Yingxue, Yuan Zhejun (Harbin Institute of Technology, Harbin 150001);[J];Aviation Precision Manufacturing T2001-01
ZHU Ying, YAO Ying-xue, CHEN Shuo-dong, ZHOU Liang, S. A. Pahlovy (Dept. of Mechanical Engineering, Harbin Institute of Technology, Harbin, 150001, China);[J];Aviation Metrology & Measurement T2005-03
WANG YQIAO LGAO KSU YCHU WWANG Zhonglin Department of Materials Physics, University of Science and Technology Beijing, Beijing 100083;[J];Acta Metallrugica S2004-06
【Secondary References】
Chinese Journal Full-text Database
CHEN Wei-yi,LU Chang-hong,QI Huan,WANG Yan,MENG Fan-bo(School of Science,Beijing Institute of Technology,Beijing 100081,China);[J];College P2009-12
YANG Lei,YU Hong*,ZHAO YangKey Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,C[J];Chinese Journal of Electron D2009-06
Zeng Rongyao1,Ding Xidong1,2,Liu Zhiyu3,Fu Gang3(1.School of Physics Science and Engineering,Sun Yat-sen University,Guangzhou .State Key Laboratory of Optoelectronic Materials and Technologies,Guangzhou .Solid State Physics and Materials Research Laboratory,Guangzhou University,Guangzhou 510405,China);[J];Semiconductor T2010-06
XU Zong-wei1,2,FANG Feng-zhou1,2,ZHAO Tie-qiang3,DONG Shen4(1.Centre of MicroNano Manufacturing Technology,State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin .Tianjin MicroNano Manufacturing Technology Limited Company,Tianjin .Institute of Cardiovascular Sciences,Peking University,Beijing .Center for Precision Engineering,Harbin Institute of Technology,Harbin 150001,China);[J];Journal of Tianjin U2009-10
【Secondary Citations】
Chinese Journal Full-text Database
Zhou Zhaoying(Tsinghua University,Beijing,China)
Ye Xionying
Xion Shenshu
Wang Xiaohao
Zhang Wendong
Cai Hainan
Gong Qiulian
993;[J];CHINA MECHANICAL ENGINEERING;1999-09
Similar Journals
(C)2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved}